Assembly of air bearings for wafer steppers
Final cleaning of satellite mirrors
Check of standard gauges for angular position gauging
Clean and dust-free assembly!
The KUGLER clean room is suitable for component assembly for the sensitive F2-UV laser. Here your valuable components are profesionally assembled, measured, cleaned or packed.
The KUGLER clean room is suitable for component assembly for the sensitive F2-UV laser. Here your valuable components are profesionally assembled, measured, cleaned or packed.
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Typical applications
- Assembly of air bearings for wafer steppers
- Final cleaning of satellite mirrors
- Check of standard gauges for angular position gauging