
for partially-automated angular measurements of calibration standards and precision angles of prisms from single or series production batches.
The newly designed measuring system is used for absolute angular measurements of prisms and consists of an air-bearing ultra-precision rotary table with high-resolution Heidenhain angular measurement system (36,000 increments / 360°) as well as of an ultra-precision auto-collimation telescope
(resolution 0.005 arc seconds/ precision 0.02 arc seconds).
Owing to this state-of-the-art equipment the test setup combines high measuring accuracy with excellent user convenience. The measuring system enables absolute measurements of angular prisms for all angles between 0° and 360, and it also allows infinite rotation in both directions.
The precision unit is ideally suitable for calibrating international standards and for use in research, laboratory, incoming and outgoing goods applications.
Absolute measurements of angles between optical surfaces (e.g. polygon mirrors) can be determined by measuring the angular position of the rotary table.
To achieve this, the auto-collimator is first brought into collimation with the first surface. This angular position is used as the reference value. Then the auto-collimator is brought into collimation with the second surface (a Fizeau interferometer can also be used). The (optional) evaluation software calculates the exact angular position from the measuring values of the encoder. The reproducible positioning accuracy is at +/- 0.05 arc seconds.
The rotary table and auto-collimator are located on a precision granite base, which rests on a vibration-free steel frame. The steel frame accommodates an integrated air-processing system as well as the control electronics of the piezo-operated rotary table.
Technical data of the air-bearing rotary table Typ RT400UP
Measuring range 0° - 360°
Resolution 0,000024°/ 0,008 arc seconds
Reproducible accuracy +/- 0,05 arc seconds
Radial & axial runout ≤ 0,2 μm
Axial load >/= 1500N(centric)
Rotating speed 0-3 rpm (stageless)
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