Vacuum clamping plates

Vacuum clamping plates

Vacuum clamping plates for semi-conductor wafers (“chucks”), miniature aerostatic bearings for nanometer positioning in wafer steppers, components for lenses and laser beam guidance systems - for the precision level required in this case, the ultra-precision machining by Kugler provides technology that enables exceptional economic solutions.

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Kugler of AmericaMeinrad Schirmeister
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Enfield, CT 06082

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